SOI device with DTI and STI

ABSTRACT

A method of forming an SOI structure which includes providing a semiconductor on insulator (SOI) substrate having an SOI layer, an intermediate buried oxide (BOX) layer and a bottom substrate; patterning the SOI layer to form first and second openings in the SOI layer; extending the first openings into the bottom substrate; enlarging the first openings within the bottom substrate; filling the first and second openings with an insulator material to form deep trench isolations (DTIs) from the first openings and shallow trench isolations (STIs) from the second openings; implanting in the bottom substrate between the DTIs to form wells; and forming semiconductor devices in the SOI layer between the DTIs with each semiconductor device being separated from an adjacent semiconductor device by an STI.

RELATED APPLICATION

This application is a divisional of U.S. patent application Ser. No.13/088,376, filed Apr. 17, 2011, entitled “SOI DEVICE WITH DTI AND STI”,now U.S. Pat. No. 8,525,292, the disclosure of which is incorporated byreference herein.

BACKGROUND

The present invention relates to the fabrication of semiconductordevices on a semiconductor on insulator (SOI) substrate, and moreparticularly, to the fabrication of semiconductor devices on anextremely thin SOI substrate with improved isolation and a thin buriedoxide layer.

Extremely thin SOI substrates (ETSOI), also known as fully depleted SOI(FDSOI), rely on an ultra-thin semiconductor layer (for example,silicon) on a buried oxide layer. “Fully-depleted” means that theconducting channel of the transistor is depleted of charge by the timethe transistor turns on which can only occur in SOI technologies becausein bulk silicon there is an almost infinite source of charge availablethat cannot be depleted. The performance advantage of fully-depletedtransistors comes from the fact that when there is no charge in thechannel, the entire gate voltage is applied to create a conductingchannel.

ETSOI is a viable device option for extending CMOS scaling. The devicecharacteristics of ETSOI can be tuned by doping and/or applying backgate bias which enables device tuning and/or multiple threshold voltages(V_(T)).

A challenge for enabling the back gate doping and biasing is theisolation.

BRIEF SUMMARY

The various advantages and purposes of the exemplary embodiments asdescribed above and hereafter are achieved by providing a method offorming an SOI structure. The method includes providing a semiconductoron insulator (SOI) substrate having an SOI layer, an intermediate buriedoxide (BOX) layer and a bottom substrate; patterning the SOI layer toform first and second openings in the SOI layer; extending the firstopenings into the bottom substrate; enlarging the first openings withinthe bottom substrate; filling the first and second openings with aninsulator material to form deep trench isolations (DM) from the firstopenings and shallow trench isolations (STIs) from the second openings;implanting in the bottom substrate between the DTIs to form wells; andforming semiconductor devices in the SOI layer between the DTIs witheach semiconductor device being separated from an adjacent semiconductordevice by an STI.

BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS

The features of the exemplary embodiments believed to be novel and theelements characteristic of the exemplary embodiments are set forth withparticularity in the appended claims. The Figures are for illustrationpurposes only and are not drawn to scale. The exemplary embodiments,both as to organization and method of operation, may best be understoodby reference to the detailed description which follows taken inconjunction with the accompanying drawings in which:

FIGS. 1A to 1G illustrate a first exemplary embodiment in which:

FIG. 1A illustrates an SOI substrate used in the exemplary embodiment:

FIG. 1B illustrates the patterning of the SOI layer;

FIG. 1C illustrates the extending of the DTI trench into the substrate;

FIG. 1D illustrates the filling of the DTI and STI trenches;

FIG. 1E illustrates the forming of N-type and P-type wells in thesubstrate;

FIG. 1F illustrates the forming of NFETs and PFETs in the SOI layer;

FIG. 1G illustrates the forming of an interlevel dielectric and wellcontacts.

FIGS. 2A to 2H illustrate a second exemplary embodiment in which:

FIG. 2A illustrates an SOI substrate used in the exemplary embodiment:

FIG. 2B illustrates the patterning of the SOI layer;

FIG. 2C illustrates the forming of spacers;

FIG. 2D illustrates the extending of the DTI trenches into thesubstrate;

FIG. 2E illustrates the enlarging of the DTI trenches;

FIG. 2F illustrates the filling of the DTI and STI trenches;

FIG. 2G illustrates the forming of N-type and P-type wells in thesubstrate;

FIG. 2H illustrates the forming of NFETs and PFETs in the SOI layer, theforming of an interlevel dielectric and well contacts.

FIGS. 3A to 3H illustrate a third exemplary embodiment in which:

FIG. 3A illustrates an SOI substrate used in the exemplary embodiment:

FIG. 3B illustrates the patterning of the SOI layer;

FIG. 3C illustrates the conformal deposition of spacer material;

FIG. 3D illustrates the forming of spacers and the extending of the DTItrenches into the substrate;

FIG. 3E illustrates the enlarging of the DTI trenches;

FIG. 3F illustrates the filling of the DTI and STI trenches;

FIG. 3G illustrates the forming of N-type and P-type wells in thesubstrate;

FIG. 3H illustrates the forming of NFETs and PFETs in the SOI layer, theforming of an interlevel dielectric and well contacts.

FIGS. 4A to 4H illustrate a fourth exemplary embodiment in which:

FIG. 4A illustrates an SOI substrate used in the exemplary embodiment:

FIG. 4B illustrates the patterning of the SOI and BOX layers;

FIG. 4C illustrates the forming of spacers;

FIG. 4D illustrates the extending of the DTI trenches into thesubstrate;

FIG. 4E illustrates the enlarging of the DTI trenches;

FIG. 4F illustrates the filling of the DTI and STI trenches;

FIG. 4G illustrates the forming of N-type and P-type wells in thesubstrate;

FIG. 4H illustrates the forming of NFETs and PFETs in the SOI layer, theforming of an interlevel dielectric and well contacts.

FIGS. 5A to 5H illustrate a fifth exemplary embodiment in which:

FIG. 5A illustrates an SOI substrate used in the exemplary embodiment:

FIG. 5B illustrates the patterning of the SOI and BOX layers;

FIG. 5C illustrates the conformal deposition of spacer material;

FIG. 5D illustrates the forming of spacers and the extending of the DTItrenches into the substrate;

FIG. 5E illustrates the enlarging of the DTI trenches;

FIG. 5F illustrates the filling of the DTI and STI trenches;

FIG. 5G illustrates the forming of N-type and P-type wells in thesubstrate;

FIG. 5H illustrates the forming of NFETs and PFETs in the SOI layer, theforming of an interlevel dielectric and well contacts.

DETAILED DESCRIPTION

In order to tune the V_(T) of N-type field effect transistor (NFET) andP-type field effect transistor (PFET) devices in ETSOI architecture,doping and/or back gate bias may be applied. Devices sharing the commonback-gate bias may be isolated from the rest of the chip by deep-trenchisolation. Within the deep-trench isolation region the individualdevices may be separated from each other using shallow-trench isolation.

Accordingly, the present exemplary embodiments provide a structure and amethod for forming an ETSOI circuit with a deep trench isolation forinterwell (well to well) isolation and a shallow trench isolation forintrawell (within the same well) isolation. The lower portion of thedeep trench isolation below the buried oxide layer may be enlarged toimprove isolation and enhance process window, for example, to improveoverlay tolerance.

The present invention relates to the fabrication of a circuit on asemiconductor on insulator (SOI) substrate which includes an SOI layer(for example, silicon), a buried oxide (BOX) layer and a bottomsubstrate, usually silicon. In exemplary embodiments, the SOI substrateis an extremely thin SOI substrate wherein the SOI layer has a thicknessof about 3 to 15 nanometers. In further exemplary embodiments, the BOXlayer is a thin BOX layer having a thickness of about 10 to 140nanometers. This is compared to a typical SOI substrate having an SOIlayer with a thickness of about 40-100 nanometers and a BOX layer with athickness of about 150 nanometers or higher.

The SOI circuit includes deep trench isolation (DTI) for well-to-wellisolation and a shallow trench isolation for isolation within the samewell. The lower portion of the DTI below the BOX layer is enlarged toimprove isolation and enhance the process window such as by improvingoverlay tolerance.

Referring to the Figures in more detail, and particularly referring toFIGS. 1A to 1G, there is illustrated a first exemplary embodiment. InFIG. 1A, an SOI substrate 100 is provided or manufactured. The SOIsubstrate 100 includes an SOI layer 102, a BOX layer 104 and a bottomsubstrate 106. In a preferred exemplary embodiment, the SOI layer 102 isan extremely thin SOI layer and the BOX layer 104 is a thin BOX layer.

Referring now to FIG. 1B, a pad film 108 may be formed over the SOIlayer 102. The pad film 108 is used for patterning the underlying SOIsubstrate 100 and may include a combination of pad oxide and a padnitride. Thereafter, a photoresist 110 may be applied, exposed anddeveloped to form openings 112. Through an etching process, such as aconventional reactive ion etching (RIE) process, the openings 112 areextended through pad film 108 and the SOI layer 102 and stopping on theBOX layer 104.

Referring now to FIG. 1C, the first photoresist 110 is conventionallystripped. A second photoresist 114 may be applied, exposed and developedto cover some of the openings 112. Others of the openings 112 are leftuncovered. The openings 112 that are left uncovered are referred tohereafter as DTI openings 116 and in a later step will be extended intothe bottom substrate 106 and be filled to function as deep trenchisolation (DTI). The openings that are covered by the resist 114 arereferred to hereafter as STI openings 118 and in a later step will befilled to function as shallow trench isolation (STI).

In a two-step etching process, the DTI openings 116 are extended intothe bottom substrate 106 by etching through the box layer 104 and aportion of the bottom substrate 106. It is noted that the DTI openings116 are enlarged during the two-step etching process to formbottle-shaped openings 120 within the bottom substrate 106. A polymericresidue 122 may be generated during the etching of the DTI openings 116.The polymeric residue 122 may passivate the upper trench sidewall 124while the lower trench is etched to form the bottle-shaped opening 120.Any reactive ion etch (RIE) process that etches a silicon substrate issuitable for forming the bottle-shaped trench. For example, the processconditions for those two steps may have the same pressure (180 mTorr),same HBr flow rate (325 sccm), same NF3 flow rate (40 sccm), same highfrequency power (450 W), but different O2 flow rate (30 sccm for thefirst step and 20 sccm for the second step), and different low frequencypower (900 W for the first step and 1400 W for the second step. Thepolymeric residue 122 may result from a RIE byproduct such as siliconoxyfluoride (Si_(x)O_(y)F_(z)).

The polymeric residue 122 may be stripped, for example, by oxygen plasmaand the second resist 114 may be conventionally stripped.

Referring now to FIG. 1D, the DTI openings 116 and STI openings 118 maybe filled with an electrically insulating material and then planarizedby a conventional chemical-mechanical polishing process. In an exemplaryembodiment, the DTI openings and STI openings 118 are filled with anoxide, such as silicon dioxide. There may also be a dielectric liner(for example, silicon nitride) on the walls and bottom of the DTIopenings 116 and STI openings 118 prior to deposition of oxide fill. Thedielectric liner, if present, may be conformally deposited prior toblanket deposition of the oxide. The DTI openings 116 filled with oxideare now referred to hereafter as deep trench isolation (or just DTI) 126while the STI openings 118 filled with oxide are now referred tohereafter as shallow trench isolation (or just STI) 128.

Referring now to FIG. 1E, the pad film 108 (FIG. 1D) is conventionallystripped which also removes an equally thick layer of oxide so thatplanarization by a process such as chemical-mechanical polishing may notbe necessary. The bottom substrate 106 is implanted to form N wells 130and P wells 132 which will form the back gate for semiconductor devicesto be formed hereafter. The implantation may be a multiple-step process.A combination of low and high implantation energies may be used toachieve N and P wells 130, 132 that extend roughly 200 nanometers belowthe BOX (layer 104) bottom interface into the substrate layer 106. Thespecie for the N wells 130 may be, for example, arsenic or phosphorus,while the implanted specie for the P wells 132 may be, for example,boron or born fluoride (BF₂). DTI 120 provides isolation of N wells 130and P wells 132.

Referring to FIG. 1F, conventional field effect transistor (FET) devicesmay be formed in SOI layer 102. For purposes of illustration and notlimitation, over N well 130 are formed PFETs 134 and over P well 132 areformed NFETs 136. It is also within the scope of the present inventionfor there to be NFETs over the N well 130 and PFETs over P well 132.Separating the FET devices 134 or 136 is STI 128. For example, PFETs 134are separated by STI 128 while NFETs 136 are also separated by STI 128.The PFETs 134 and NFETs 136 are shown as having a raised source/drain(RSD).

Referring now to FIG. 1G, an interlevel dielectric 142 has been appliedover the nFETs 134 and pFETs 136. Well contacts 138 may be formed tocontact N wells 130 and well contacts 140 may be formed to contact Pwells 132. The well contacts 138, 140 enable the same or different backbias. Well contacts 138, 140 may be formed by masking the FET devices134, 136, etching through the interlevel dielectric 142, STI 128 and BOXlayer 104 and then filling with a metal such as tungsten. There may be aslight overetching into the substrate 106 to ensure good contact withthe N wells 130 and P wells 132.

A second exemplary embodiment is illustrated in FIGS. 2A to 2H. Thesecond exemplary embodiment is similar to the first exemplary embodimentexcept for the formation of spacers after the first trench etch as willbe described hereafter.

Referring to FIG. 2A, an SOI substrate 200 is provided or manufactured.The SOI substrate 200 includes an SOI layer 202, a BOX layer 204 and abottom substrate 206. In exemplary embodiments, the SOI substrate is anextremely thin SOI substrate and may have a thin BOX layer as describedpreviously.

Referring now to FIG. 2B, a pad film 208 may be formed over the SOIlayer 202. The pad film 208 and photoresist 210 may be used for formingopenings 212 through the photoresist 210, pad film 208 and SOI layer 202as in the first exemplary embodiment.

Referring now to FIG. 2C, the first photoresist 210 is conventionallystripped. Thereafter, spacers 215 may be formed on the walls of theopenings 212. In an exemplary process, spacer material may beconformally deposited and then etched by a directional (anisotropic)reactive ion etching process to form the spacers 215. The spacers 215may be made from a material such as silicon oxide, silicon nitride,alumina or a high dielectric constant material such as hafnium oxide orhafnium silicate. The spacers 215 protect the SOI layer 202 in the upperpart of the trench when the trench is enlarged in the bottom substrate206.

Referring now to FIG. 2D, a second photoresist 214 may be applied,exposed and developed to cover some of the openings 212. Others of theopenings 212 are left uncovered. The openings 212 that are leftuncovered are referred to hereafter as DTI openings 216 and in a laterstep will be filled to function as deep trench isolation. The openingsthat are covered by the resist 214 are referred to hereafter as STIopenings 218 and in a later step will be filled to function as shallowtrench isolation.

The DTI openings 216 are extended into the bottom substrate 206 byetching through the box layer 204 and a portion of the bottom substrate206. A directional RIE process may be used to extend the openings 216. ARIE process similar to that in the first exemplary embodiment to extendthe openings may be utilized here except that only the first step of the2-step RIE process is used. In this exemplary embodiment, the DTIopenings are extended in a first step and then enlarged as describedhereafter in a second step.

Referring to FIG. 2E, the DTI openings 216 are enlarged in the bottomsubstrate 206 during the etching process to form bottle-shaped openings220 within the bottom substrate 206. The enlargement of the DTI openings216 may be performed by a silicon etch process such as a wet etch byammonia. The second photoresist 214 (FIG. 2D) may be conventionallystripped either before or after the formation of the bottle-shapedopenings 220.

Referring now to FIGS. 2F to 2H, processing of the SOI substrate 200continues as in the first exemplary embodiment. That is, the DTIopenings 216 and STI openings 218 may be filled and then planarized by aconventional chemical-mechanical polishing process as shown in FIG. 2Ffollowed by stripping of the pad film 208 and implanting to form N wells230 and P wells 232 as shown in FIG. 2G. Thereafter, as shown in FIG.2H, conventional field effect transistor (FET) devices may be formed inSOI layer 202 separated by STI 228. For purposes of illustration and notlimitation, over N well 230 are formed pFETs 234 and over P well 232 areformed nFETs 236. Interlevel dielectric 242 may be deposited and N wellcontacts 238 and P well contacts 240 may be formed.

A third exemplary embodiment is illustrated in FIGS. 3A to 3H. The thirdexemplary embodiment is similar to the first exemplary embodiment exceptfor the formation of spacers after the first trench etch and the etchingof the spacers occurring after the second lithography as will bedescribed hereafter.

Referring to FIG. 3A, an SOI substrate 300 is provided or manufactured.The SOI substrate 300 includes an SOI layer 302, a BOX layer 304 and abottom substrate 306. In exemplary embodiments, the SOI substrate is anextremely thin SOI substrate and may have a thin BOX layer as describedpreviously.

Referring now to FIG. 3B, a pad film 308 may be formed over the SOIlayer 302. The pad film 308 and photoresist 310 may be used for formingopenings 312 through the photoresist 310, pad film 308 and SOI layer 302as in the first exemplary embodiment.

Referring now to FIG. 3C, the first photoresist 310 is conventionallystripped. Thereafter, spacer material 315 may be conformally depositedeverywhere so as to cover the walls and bottoms of the openings 312. Thespacer material may be a material such as silicon oxide, siliconnitride, alumina or a high dielectric constant material such as hafniumoxide or hafnium silicate.

Referring now to FIG. 3D, a second photoresist 314 may be applied,exposed and developed to cover some of the openings 312. Others of theopenings 312 are left uncovered. The openings 312 that are leftuncovered are referred to hereafter as DTI openings 316 and in a laterstep will be filled to function as deep trench isolation. The openingsthat are covered by the resist 314 are referred to hereafter as STIopenings 318 and in a later step will be filled to function as shallowtrench isolation.

Spacer material 315 within DTI openings 316 may be etched by adirectional (anisotropic) reactive ion etching process to form thespacers 317. The spacers 317 protect the SOI layer 302 in the upper partof the trench when the trench is enlarged in the bottom substrate 306.The DTI openings 316 are extended into the bottom substrate 306 by asecond directional reactive ion etching process (as described above inthe second exemplary embodiment) through the box layer 304 and a portionof the bottom substrate 306.

Unetched spacer material 315 within STI openings 318 protected by thesecond photoresist 314 ensures a robust layer of spacer material 315 onthe walls and bottom of the STI openings 318 and may help to preventundesired electrical connection between the SOI layer 302 and the bottomsubstrate 306.

Referring to FIG. 3E, the DTI openings 316 are enlarged in the bottomsubstrate 306 during the etching process to form bottle-shaped openings320 within the bottom substrate 306. The enlargement of the DTI openings316 may be performed by a silicon etch process such as a wet etch byammonia. The second photoresist 314 (FIG. 3D) may be conventionallystripped either before or after the formation of the bottle-shapedopenings 320.

Referring now to FIGS. 3F to 3H, processing of the SOI substrate 300continues as in the first exemplary embodiment. That is, the DTIopenings 316 and STI openings 318 may be filled and then planarized by aconventional chemical-mechanical polishing process as shown in FIG. 3Ffollowed by stripping of the pad film 308 and implanting to form N wells330 and P wells 332 as shown in FIG. 3G. Thereafter, as shown in FIG.3H, conventional field effect transistor (FET) devices may be formed inSOI layer 302 separated by STI 328. For purposes of illustration and notlimitation, over N well 330 are formed pFETs 334 and over P well 332 areformed nFETs 336. Interlevel dielectric 342 may be deposited and N wellcontacts 338 and P well contacts 340 may be formed.

A fourth exemplary embodiment is illustrated in FIGS. 4A to 4H. Thefourth exemplary embodiment is similar to the first exemplary embodimentexcept for the etching of the SOI layers and the BOX layer during thefirst trench etch and for the formation of spacers after the firsttrench etch.

Referring to FIG. 4A, an SOI substrate 400 is provided or manufactured.The SOI substrate 400 includes an SOI layer 402, a BOX layer 404 and abottom substrate 406. In exemplary embodiments, the SOI substrate is anextremely thin SOI substrate and may have a thin BOX layer as describedpreviously.

Referring now to FIG. 4B, a pad film 408 may be formed over the SOIlayer 402. The pad film 408 and photoresist 410 may be used for formingopenings 412 through the photoresist 410, pad film 408 and SOI layer 402as in the first exemplary embodiment. However, in this fourth exemplaryembodiment, the openings 412 are further extended through the BOX layer404. There may also be a slight overetch into the bottom substrate 406to ensure that the BOX layer 404 is completely etched through.

Referring now to FIG. 4C, the first photoresist 410 is conventionallystripped. Thereafter, spacers 415 may be formed on the walls of theopenings 412. Spacer material may be conformally deposited and thenetched by a directional (anisotropic) reactive ion etching process toform the spacers 415. The spacers may be made from a material such assilicon oxide, silicon nitride, alumina or a high dielectric constantmaterial such as hafnium oxide or hafnium silicate. The spacers 415protect the SOI layer 402 and BOX layer 404 in the upper part of thetrench when the trench is enlarged in the bottom substrate 406.

Referring now to FIG. 4D, a second photoresist 414 may be applied,exposed and developed to cover some of the openings 412. Others of theopenings 412 are left uncovered. The openings 412 that are leftuncovered are referred to hereafter as DTI openings 416 and in a laterstep will be filled to function as deep trench isolation. The openingsthat are covered by the resist 414 are referred to hereafter as STIopenings 418 and in a later step will be filled to function as shallowtrench isolation.

The DTI openings 416 are extended into the bottom substrate 406 by adirectional reactive ion etching process (as described above in thesecond exemplary embodiment) through a portion of the bottom substrate406.

Referring to FIG. 4E, the DTI openings 416 are enlarged in the bottomsubstrate 406 during the etching process to form bottle-shaped openings420 within the bottom substrate 406. The enlargement of the DTI openings416 may be performed by a silicon etch process such as a wet etch byammonia. The second photoresist 414 (FIG. 4D) may be conventionallystripped either before or after the formation of the bottle-shapedopenings 420.

Referring now to FIGS. 4F to 4H, processing of the SOI substrate 400continues as in the first exemplary embodiment. That is, the DTIopenings 416 and STI openings 418 may be filled and then planarized by aconventional chemical-mechanical polishing process as shown in FIG. 4Ffollowed by stripping of the pad film 408 and implanting to form N wells430 and P wells 432 as shown in FIG. 4G. Thereafter, as shown in FIG.4H, conventional field effect transistor (FET) devices may be formed inSOI layer 402 separated by STI 428. For purposes of illustration and notlimitation, over N well 430 are formed pFETs 434 and over P well 432 areformed nFETs 436. Interlevel dielectric 442 may be deposited and N wellcontacts 438 and P well contacts 440 may be formed.

A fifth exemplary embodiment is illustrated in FIGS. 5A to 5H. The fifthexemplary embodiment is similar to the first exemplary embodiment exceptfor the etching of the SOI layers and the BOX layer during the firsttrench etch, the formation of spacers after the first trench etch andthe etching of the spacers occurring after the second lithography aswill be described hereafter.

Referring to FIG. 5A, an SOI substrate 500 is provided or manufactured.The SOI substrate 500 includes an SOI layer 502, a BOX layer 504 and abottom substrate 506. In exemplary embodiments, the SOI substrate is anextremely thin SOI substrate and may have a thin BOX layer as describedpreviously.

Referring now to FIG. 5B, a pad film 508 may be formed over the SOIlayer 502. The pad film 508 and photoresist 510 may be used for formingopenings 512 through the photoresist 510, pad film 508 and SOI layer 502as in the first exemplary embodiment. However, in this fifth exemplaryembodiment, the openings 512 are further extended through the BOX layer504. There may also be a slight overetch into the bottom substrate 506to ensure that the BOX layer 504 is completely etched through.

Referring now to FIG. 5C, the first photoresist 510 is conventionallystripped. Thereafter, spacer material 515 may be conformally depositedeverywhere so as to cover the walls and bottoms the openings 512. Thespacer material may be a material such as silicon oxide, siliconnitride, alumina or a high dielectric constant material such as hafniumoxide or hafnium silicate.

Referring now to FIG. 5D, a second photoresist 514 may be applied,exposed and developed to cover some of the openings 512. Others of theopenings 512 are left uncovered. The openings 512 that are leftuncovered are referred to hereafter as DTI openings 516 and in a laterstep will be filled to function as deep trench isolation. The openingsthat are covered by the resist 514 are referred to hereafter as STIopenings 518 and in a later step will be filled to function as shallowtrench isolation.

Spacer material 515 within DTI openings 516 may be etched by adirectional (anisotropic) reactive ion etching process to form thespacers 517. The spacers 517 protect the SOI layer 502 and BOX layer 504in the upper part of the trench when the trench is enlarged in thebottom substrate 506. The DTI openings 516 are extended into the bottomsubstrate 506 in a second directional reactive ion etching process (asdescribed above in the second exemplary embodiment) by etching through aportion of the bottom substrate 506.

Unetched spacer material 515 within STI openings 518 protected by thesecond photoresist 514 ensures a robust layer of spacer material 515 onthe walls and bottom of the STI openings 518 and may help to preventundesired electrical connection between the SOI layer 502 and the bottomsubstrate 506.

Referring to FIG. 5E, the DTI openings 516 are enlarged in the bottomsubstrate 506 during the etching process to form bottle-shaped openings520 within the bottom substrate 506. The enlargement of the DTI openings516 may be performed by a silicon etch process such as a wet etch byammonia. The second photoresist 514 (FIG. 5D) may be conventionallystripped either before or after the formation of the bottle-shapedopenings 520.

Referring now to FIGS. 5F to 5H, processing of the SOI substrate 500continues as in the first exemplary embodiment. That is, the DTIopenings 516 and STI openings 518 may be filled and then planarized by aconventional chemical-mechanical polishing process as shown in FIG. 5Ffollowed by stripping of the pad film 508 and implanting to form N wells530 and P wells 532 as shown in FIG. 5G. Thereafter, as shown in FIG.5H, conventional field effect transistor (FET) devices may be formed inSOI layer 502 separated by STI 528. For purposes of illustration and notlimitation, over N well 530 are formed pFETs 534 and over P well 532 areformed nFETs 536. Interlevel dielectric 542 may be deposited and N wellcontacts 538 and P well contacts 540 may be formed.

After the processing described in FIGS. 1A to 1G, 2A to 2H, 3A to 3H, 4Ato 4H and 5A to 5H, further conventional processing to form contacts andback end of the line wiring layers may proceed hereafter to form asemiconductor device such as a MOSFET. It is to be understood that thesemiconductor structures shown in FIGS. 1A to 1G, 2A to 2H, 3A to 3H, 4Ato 4H and 5A to 5H form only a part of a MOSFET and that there will be aplurality of such semiconductor structures in the finished MOSFET.

It will be apparent to those skilled in the art having regard to thisdisclosure that other modifications of the exemplary embodiments beyondthose embodiments specifically described here may be made withoutdeparting from the spirit of the invention. Accordingly, suchmodifications are considered within the scope of the invention aslimited solely by the appended claims.

What is claimed is:
 1. A method of forming an SOI structure comprising:providing a semiconductor on insulator (SOI) substrate having an SOIlayer, an intermediate buried oxide (BOX) layer and a bottom substrate;patterning the SOI layer to form first and second openings in the SOIlayer; extending the first openings into the bottom substrate; enlargingthe first openings within the bottom substrate; filling the first andsecond openings with an insulator material to form deep trenchisolations (DM) from the first openings and shallow trench isolations(STIs) from the second openings; implanting in the bottom substratebetween the DTIs to form wells; and forming semiconductor devices in theSOI layer between the DTIs with each semiconductor device beingseparated from an adjacent semiconductor device by an STI.
 2. The methodof claim 1 wherein the SOI substrate is an extremely thin SOI substrate.3. The method of claim 2 wherein the SOI layer has a thickness of 3 to15 nanometers.
 4. The method of claim 1 wherein the BOX layer has athickness of 10 to 140 nanometers.
 5. The method of claim 1 whereinextending the first openings into the bottom substrate includes etchingthe BOX layer and the substrate by an etching process that leaves apassivating residue on the SOI layer and BOX layer while the substrateis being etched.
 6. The method of claim 1 wherein after patterning theSOI layer to form first and second openings in the SOI layer and beforeextending the first openings into the bottom substrate, forming spacerson sidewalls of the first and second openings.
 7. The method of claim 6wherein the spacers comprise a material selected from the groupconsisting of oxide, nitride, alumina and a high dielectric constantmaterial.
 8. The method of claim 1 wherein after patterning the SOIlayer to form first and second openings in the SOI layer and beforeextending the first openings into the bottom substrate, conformallydepositing a spacer material on sidewalls and bottoms of the first andsecond openings.
 9. The method of claim 1 wherein the spacer materialcomprises a material selected from the group consisting of oxide,nitride, alumina and a high dielectric constant material.
 10. The methodof claim 1 wherein patterning the SOI layer to form first and secondopenings in the SOI layer includes patterning the BOX layer so as toextend the first and second openings through the BOX layer.
 11. Themethod of claim 10 wherein after patterning the SOI layer and BOX layerto form first and second openings in the SOI layer and BOX layer andbefore extending the first openings into the bottom substrate, formingspacers on sidewalls of the first and second openings.
 12. The method ofclaim 11 wherein the spacers comprise a material selected from the groupconsisting of oxide, nitride, alumina and a high dielectric constantmaterial.
 13. The method of claim 10 wherein after patterning the SOIlayer and BOX layer to form first and second openings in the SOI layerand BOX layer and before extending the first openings into the bottomsubstrate, conformally depositing a spacer material on sidewalls andbottoms of the first and second openings.
 14. The method of claim 13wherein the spacer material comprises a material selected from the groupconsisting of a oxide, nitride, alumina, and a high dielectric constantmaterial.